epub @ SUB HH

85.40.-e Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology (see also 85.45.-w Vacuum microelectronics) ... ... Microwave integrated electronics, see 84.40.Lj ... ... Integrated optics, see 42.82.-m ... ... Superconducting logic elements and memory devices; microelectronic circuits, see 85.25.Hv ( 0 Dok. )

• 85.40.Bh Computer-aided design of microcircuits; layout and modeling ( 0 Dok. )
• 85.40.Hp Lithography, masks and pattern transfer ... ... Micro- and nano-electromechanical systems (MEMS/NEMS) and devices, see 85.85.+j ( 0 Dok. )
• 85.40.Ls Metallization, contacts, interconnects; device isolation ( 0 Dok. )
• 85.40.Qx Microcircuit quality, noise, performance, and failure analysis ( 0 Dok. )
• 85.40.Ry Impurity doping, diffusion and ion implantation technology ( 0 Dok. )
• 85.40.Sz Deposition technology (for plasma applications in deposition technology, see 52.77.Dq) ... ... Bipolar integrated circuits, see 85.30.Pq ... ... Field effect integrated circuits, see 85.30.Tv ( 0 Dok. )
• 85.40.Xx Hybrid microelectronics; thick films ( 0 Dok. )