epub @ SUB HH

81.65.-b Surface treatments (see also 85.40.-e Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology) ( 0 Dok. )

• 81.65.Cf Surface cleaning, etching, patterning (see also 52.77.Bn Etching and cleaning in physics of plasmas) ( 0 Dok. )
• 81.65.Kn Corrosion protection (see also 82.45.Bb Corrosion and passivation in ( 0 Dok. )
• 81.65.Lp Surface hardening: nitridation, carburization, carbonitridation ( 0 Dok. )
• 81.65.Mq Oxidation ( 0 Dok. )
• 81.65.Ps Polishing, grinding, surface finishing ( 0 Dok. )
• 81.65.Rv Passivation (see also 82.45.Bb Corrosion and passivation in ( 0 Dok. )
• 81.65.Tx Gettering ( 0 Dok. )