epub @ SUB HH

68.55.-a Thin film structure and morphology (for methods of thin film deposition, film growth and epitaxy, see 81.15.-z) ( 0 Dok. )

• 68.55.Ac Nucleation and growth: microscopic aspects ( 0 Dok. )
• 68.55.Jk Structure and morphology; thickness; crystalline orientation and ( 0 Dok. )
• 68.55.Ln Defects and impurities: doping, implantation, distribution, concentration, etc. (for diffusion of impurities, see 66.30.Jt) ( 0 Dok. )
• 68.55.Nq Composition and phase identification ( 0 Dok. )