epub @ SUB HH

52.77.-j Plasma applications ( 0 Dok. )

• 52.77.Bn Etching and cleaning (see also 81.65.Cf Surface cleaning, etching, patterning in surface treatments) ( 0 Dok. )
• 52.77.Dq Plasma-based ion implantation and deposition (see also 81.15.Jj Ion and electron beam-assisted deposition) ( 0 Dok. )
• 52.77.Fv High-pressure, high-current plasmas (plasma spray, arc welding, etc.) (see also 81.15.Rs Spray coating techniques) ... ... Chemical synthesis; combustion synthesis, see 81.20.Ka ( 0 Dok. )